Loading...
| item | IM-1500 | IM-VIS | IM-UV |
|---|---|---|---|
| Spectrometer Wavelength Range |
1500nm | 360~1100nm | 230~800nm |
| Probe Working Distance |
Approx. 10~13mm | Approx. 10~13mm | Approx. 10~13mm |
| Measurement Range |
10~800um (Silicon) |
7nm~49000nm (SiO2 film) |
3nm~35000nm (SiO2 film) |
| Measurement Accuracy (Ref.Block) |
+/- 0.5um (full range) +/- 0.2um (<300um) |
+/- 0.1nm (<100nm) +/- 0.5% (>100nm) |
+/- 0.1nm (<100nm) +/- 0.5% (>100nm) |
| Thickness Measurement Repeatability |
+/- 0.5um (full range) +/- 0.2um (<300um) |
+/- 0.1nm (<100nm) +/- 0.5% (>100nm) |
+/- 0.1nm (<100nm) < 0.5% (>100nm) |
| Compatible Materials |
Silicon, GaAs, SiC Sapphire, Glass… |
SiO2 / PI / PR… | SiO2 / PI / PR… |
Remark: Can be used with microscopic image architecture: @2x : FOV ~4000um @10x FOV~800um @10x FOV~400um
