Equipment Front End Module (EFEM)
HIWIN EFEM provides the clean environment required during the conveying process. Through effective control of dust generation and static suppression, the amount of pollution will not be affected during the conveying process and affect the product yield. In this way, the HIWIN Wafer Robot can quickly, safely and precisely be transported to the designated location, achieving the goal of robot automation.
Features
- Meet the diverse needs of the market: semiconductor, optical inspection, solar energy, LED industry, etc.
- Provide flexible customization: modular design, different types, sizes, 1-8 wafer loading/unloading flexible options, and production line configuration to provide the best module solution.
- International safety standard quality certification: support SECS/GEN communication architecture, international semiconductor equipment SEMI S2 certification, Class1 cleanliness, meets RoHS specifications.
- HIWIN Intelligent Single-Axis Robot integrated into Equipment Front End Module, monitoring the production status of the equipment in real time, avoid machines' unexpected shutdown.
https://www.hiwinsupport.com/product/equipment_
front_end_module/equipment_front_end_module.aspx
Video:
https://youtu.be/987WFtMgWn8?si=rUyFZ5AirCFdbIdr
